Resistivity Measurement for Semi-Insulators

Knowing the uniformity of resistivity and mobility values is critical to achieve process optimization.

A capacitive measurement circuit measures the impedance through an oscillating circuit. Since a capacitor is an effective break in a circuit within a DC environment, charge builds up on the plates of the capacitor, causing a charge imbalance and then the system stabilizes.

Semilab’s COREMA systems are based on a contactless capacitance technique used for precise resistivity characterization of semi-insulating compound semiconductors over a wide resistivity range, useful for the device manufacturing industry.

For the following application fields the main measurable materials are

Compound Semiconductor (CS) Substrate Resistivity:

GaAs – RF, Optoelectronics/Photonics
InP – Optoelectronics/High speed electronics/Photonics, Photovoltaics
SiC – RF, High power electronics
Compound Semiconductor (CS) Temperature dependence of Resistivity:
SiC, GaN, Cd